Stochastic processes are at the center of probability theory, both from a theoretical and an applied viewpoint. Stochastic processes have applications in many disciplines such as physics, computer ...

Sankhyā: The Indian Journal of Statistics, Series A (1961-2002), Vol. 55, No. 1, Dedicated to the Memory of Prasanta Chandra Mahalanobis on the Occasion of His Birth Centenary (Feb., 1993), pp.

In extreme ultraviolet (EUV) lithography, stochastics are events that have random variables. These variations, called stochastic effects, sometimes cause unwanted defects and pattern roughness in ...

Several vendors are rolling out next-generation inspection systems and software that locates problematic defects in chips caused by processes in extreme ultraviolet (EUV) lithography. Each defect ...