SAN JOSE — KLA-Tencor Corp. today announced the addition of an etch modeling and analysis module to its Prolith lithography simulation and modeling software to help users accelerate advanced ...

Colloidal lithography is a nanofabrication technique that utilizes colloidal particles as masks for creating ordered nanostructures on substrates. This cost-effective and scalable method has gained ...

From silicon nanospheres creating vivid, non-fading hues to helium atom beams etching chips at unprecedented scales, printing and lithography are entering a bold new era. These breakthroughs could ...

The term nanolithography is derived from the Greek words “nanos”, meaning Dwarf; “lithos”, meaning rock; and “grapho” meaning to write. Therefore the literal translation is "tiny writing on rocks".

Double patterning is a class of technologies developed for photolithography to enhance the feature density of computer chips. The resolution of a photoresist pattern begins to blur at around 45 nm ...